@article{1997227, title={Low Temperature Growth of Sol-Gel SrBi2Ta2O9 Thin Films by Low Pressure Annealing}, author={Maho Ushikubo and Seiich Yokoyama and Yasuyuki Ito and Hironori Matsunaga and Tsutomu Atuki and Tadashi Yonezawa and Katsumi Ogi}, journal={IEEJ Transactions on Electronics, Information and Systems}, volume={117}, number={3}, pages={227-232}, year={1997}, doi={10.1541/ieejeiss1987.117.3_227} }