Provider: Japan Science and Technology Agency Database: J-STAGE Content:text/plain; charset="utf-8" TY - JOUR TI - Electron Source for Scanning Electron Microscope TI - AU - SOHDA,Yasunari JO - Vacuum and Surface Science VL - 63 IS - 1 SP - 25 EP - 29 PY - 2020 DO - 10.1380/vss.63.25 ER -