Provider: Japan Science and Technology Agency Database: J-STAGE Content:text/plain; charset="utf-8" TY - JOUR TI - Effect of Peak Current Density on Inner-wall Deposition of Ti Films by High-power Impulse Magnetron Sputtering TI - AU - KOMIYA,Hidetoshi AU - TERANISHI,Yoshikazu AU - CHAAR,Ana B. AU - YANG,Ming AU - SHIMIZU,Tetsuhide JO - Vacuum and Surface Science VL - 63 IS - 8 SP - 404 EP - 412 PY - 2020 DO - 10.1380/vss.63.404 ER -