小特集論文
斜め成膜法により形成された吸収層をもつ低反射型ワイヤーグリッド偏光板
2011 年 65 巻 10 号 p. 1440-1445
詳細
2011 年 65 巻 10 号 p. 1440-1445
We have developed wire-grid polarizers with low reflectivity in the visible region. The polarizers consist of a bilayered structure of an absorptive layer and a (transparent) gap layer on sub-wavelength pitch gratings made of aluminum. The bilayered structure functions as a highly effective antireflection coating for wire-grid with high reflectance. In order to realize these multilayered wire-grid, the glancing angle deposition technique was used to deposit the absorptive layer just above the Al wire-grid covered with the SiO2 gap layer. Both low reflectance and high transmittance in the desired wavelength range were achieved by optimizing the thickness of each layer.
