精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
画像技術の実利用特集論文
位相シフト法における位相信頼性評価手法
鷲見 典克服部 公央亮田口 亮保黒 政大梅崎 太造堀米 秀嘉
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2016 年 82 巻 12 号 p. 1078-1084

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In this paper, we will propose an evaluation method for reliability on phase-shifting methods. Environmental noises (e.g. vibration, air turbulence) affect quality of 3D measurement results in phase-shifting interferometry. Proposed method computes the score relating to quality of phase images. The correlation between the computed scores and ripple errors (surface roughness) was revealed by the experiments with dent sample made of silicon. As a result, the correlation with proposed method are higher than conventional ones. Hence, the qualities of measured phases can be ensured by the proposed method.

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