真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
卵形冷陰極マグネトロン真空計の研究
麻蒔 立男成嶋 明香塚田 哲二
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1998 年 41 巻 8 号 p. 692-697

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Aiming at increase of the discharge volume of crossed electric and magnetic field domain, egg type magnetron gauge cathodes, a surface along the magnetic force line from a magnetic pole to the other pole, are investigated. Three egg type magnetron gauges, one with magnetic end plates, one with small pole pieces and one with large pole pieces are compared to study the effects of increasing the discharge volume of the field domain. It is found that the sudden changes of the discharge current are eliminated except the egg type one without any pole pieces at lower discharge voltage of 1 to 3 kV, and good lineariy is achieved. The gauge with small pole pieces which has magnetic flux density of 0.108 T at 1.8 mm from cathode surface, shows the best characteristics, the sensitivity I/P=2.4 and 2.7 [×10-2 A/Pa], and slope n [log I2/I1/logP2/P1] =1.26 and 1.20 at discharge voltage of 6 kV and 4 kV, respectively.

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