Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
研究論文
標準コンダクタンスエレメントとコンダクタンス変調法の組み合わせによる高真空ポンプの実効排気速度と電離真空計の感度のその場測定法
吉田 肇秋道 斉小畠 時彦
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2012 年 55 巻 5 号 p. 226-232

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  The method for in-situ measurements of the effective pumping speed of high vacuum pumps and the sensitivity of ionization gauges has been developed. The measurement system consists of the gas introduction device with the standard conductance element, and the pumping system with the conductance modulation method. The effective pumping speed of turbomolecular pump, the inverse of the correction factor of ionization gauges, and the effective accommodation coefficient of the spinning rotor gauge were measured by using fifteen kinds of gas species including water vapor. The uncertainty of the measurement was evaluated to be around ten percent. The obtained results are consistent with the conventional literature values within the measurement uncertainties.

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© 2012 一般社団法人日本真空学会
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