2007 年 54 巻 1 号 p. 25-28
Computer simulation for the preparation of C/SiC composites from methyl-trichlorosilane and hydrogen by F-CVI (Forced-flow Chemical Vapor Infiltration) reactor was studied. The mathematical modeling for the actual processes was carried out.
With one overturning, the process time could be continued for 50 min longer than that without overturning. Additionally, the total amount of deposition increased 1.4 times with several times of overturning. Additionally, effects of many operation parameters were observed for the process with four overturnings. Effects of the flow rate, the initial porosity, and the inlet concentration were observed.