Acoustical Science and Technology
Online ISSN : 1347-5177
Print ISSN : 1346-3969
ISSN-L : 0369-4232
ACOUSTICAL LETTERS
Effect of sputtering geometry on (1120) textured ZnO piezofilm
Yoshinori Miyamoto, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe
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Keywords: Piezoelectric film, Sputtering, Crystallite alignment, Zinc oxide
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2006 Volume 27 Issue 1 Pages 53-55

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© 2006 by The Acoustical Society of Japan
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