e-Journal of Surface Science and Nanotechnology
Online ISSN : 1348-0391
ISSN-L : 1348-0391
Conference -ISSS-7-
3D-Architected and Integrated Metal Oxide Nanostructures and Beyond Produced by Three-Dimensional Nanotemplate Pulsed Laser Deposition
Azusa N. HattoriYasushi FujiwaraKohei FujiwaraHidekazu Tanaka
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2015 Volume 13 Pages 279-283

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Abstract

A novel nanofabrication technique, namely three-dimensional (3D) nanotemplate pulsed laser deposition, that can typically be useful for metal oxides has been developed by combining inclined pulsed laser deposition with a 3D nanotemplate prepared by nanoimprint lithography. This method enables the production of size-adjustable and extremely small functional oxide nanostructures with a high packing density over a large area, with high controllability of their shape, location, and alignment. We report various 3D functional metal oxide nanostructures, such as a luminescent ZnO nanobox structure, a ferromagnetic semiconductor (Fe,Zn)3O4 nanobox structure, an (Fe,Mn)3O4 epitaxial nanowall wire structure, and an in-plane metal-oxide-semiconductor hetero epitaxial nanowire structure. These nanostructures should be good candidates for optoelectronic, spintronic, and electronic nanoscale device applications. [DOI: 10.1380/ejssnt.2015.279]

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