2015 Volume 135 Issue 3 Pages 114-115
An effective method to decrease the operational power of an MEMS plasma source in a vacuum ultraviolet light source is described. The floating electrode has been introduced to promote power efficiency during discharging. Furthermore, it was observed that shielding a major part of the floating electrode further enhanced its power saving capability. The ignition and sustaining powers are 5 W and 4.5 W, respectively. The power values are lower than those reported for an inductively coupled micro-plasma source with the bulk setup.
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