2015 Volume 135 Issue 5 Pages 145-151
MEMS ultrasonic sensor was fabricated using the poly(vinylidene fluoride-trifluoroethylene)[P(VDF/TrFE)] copolymer thin films having multilayer diaphragm structures. It was shown that the P(VDF/TrFE) thin film on MEMS ultrasonic sensor exhibit a remanent polarization Pr of 72 mC/m2 and a coercive field Ec of 59 MV/m. The resonant frequency, Q-value and sensitivity of the MEMS ultrasonic sensors are estimated to be on the order of 178 kHz, 24 and 45 µV/Pa, respectively. The P(VDF/TrFE) thin film was shown to be useful for piezoelectric material of MEMS ultrasonic sensor.
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