Journal of Photopolymer Science and Technology
Online ISSN : 1349-6336
Print ISSN : 0914-9244
ISSN-L : 0914-9244
Room-Temperature Nanoimprint Lithography Using Photosensitive Dry Film
Ken-ichiro Nakamatsu, Shinji Matsui
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Keywords: Photosensitive dry film, room temperature, nanoimprint, lithography
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2006 Volume 19 Issue 3 Pages 389-392

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© 2006 The Society of Photopolymer Science and Technology (SPST)
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