2008 Volume 21 Issue 6 Pages 759-760
Liquid drop spreading is effective phenomenon for understanding nature of wetting processes such as pattern development, etching, cleaning, immersion lithography and so on. Liquid spreading can be measured by contact angle measurement. Spreading coefficient c in Neumann model is estimated for each film surface. Results obtained in this experiment indicate that the liquid drops on resist surfaces are more likely to spread compared with those on the inorganic substrates.