Journal of The Adhesion Society of Japan
Online ISSN : 2187-4816
Print ISSN : 0916-4812
ISSN-L : 0916-4812
Review
On-Demand Metal-Oxide Polycrystalline Films Deposited byReactive Plasma Deposition with Dc-Arc Discharge
Tetsuya YAMAMOTO, Hisashi KITAMI, Makoto MAEHARA, Yutaka FURUBAYASHI, Toshiyuki SAKEMI
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Keywords: reactive plasma deposition, metal-oxide film, low temperature deposition, carrier transport
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2019 Volume 55 Issue 11 Pages 404-413

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