ULTRAMICROANALYSIS UTILIZING ELECTRON TUNNELING

OSAMU NISHIKAWA; MASAHIKO TOMITORI; FUMIKAZU IWAWAKI

doi:10.2116/analsci.7.Supple_1225

OSAMU NISHIKAWA, MASAHIKO TOMITORI, FUMIKAZU IWAWAKI

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Keywords: electron tunneling, ultramicroanalysis, field emission electron spectroscopy(FEES), atom-probe (A-P), scanning tunneling microscope(STM), scanning tunneling spectroscopy(STS)

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1991 Volume 7 Issue Supple Pages 1225-1230

DOI https://doi.org/10.2116/analsci.7.Supple_1225

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Abstract

The field emission microscope(FEM), the field ion microscope (FIM) and the scanning tunneling microscope(STM) are the high resolution microscopes utilizing electron tunneling. Field emission electron spectroscopy(FEES), the atom-probe(A-P) and scanning tunneling spectroscopy(STS) were developed from FEM, FIM and STM, respectively. The atomic arrangement, composition and electronic states of the Si micro-cluster on a Mo surface and the atomic step on the Si(001) plane were investigated at the level of individual surface atoms.

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