Analytical Sciences
Online ISSN : 1348-2246
Print ISSN : 0910-6340
ISSN-L : 0910-6340
ICP SPECTROCHEMICAL ANALYSIS OF FINE CERAMICS CONVERTED TO THIN FILM BY RF SPUTTERING
HIROSHI UCHIDA
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1991 Volume 7 Issue Supple Pages 1237-1238

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Abstract

RF sputtering technique has been applied to the determination of major and minor elements in sintered fine ceramics. Alumina, zirconia and PLZT converted to thin films on the qualtz plate are dissolved in hydrochloric or sulfuric acid, and analysed by ICP-AES. Analytical results are agreed with reported values of the original ceramic target after optimization of RF power, kind of sputtering gas and its pressure for each ceramics.

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