Direct Bulk and Feature Analysis of Electronic Ceramic Materials by Laser Ablation ICP-MS

Abstract

Laser Ablation ICP-MS is used to perform bulk and feature analysis of ceramic samples. The relationship between the total impurity content of ceria and its performance as an oxygen sensor is shown. A new development for feature analysis is also described allowing the descrete analysis of inclusions less than 50 microns, by the conversion of a standard Nd: YAG laser into an infra-red microprobe system.