Analytical Sciences
Online ISSN : 1348-2246
Print ISSN : 0910-6340
ISSN-L : 0910-6340
DETERMINATION OF TRACE IMPURITIES IN TANTALUM OXIDE FILMS BY INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY COMBINED WITH ION EXCHANGE
SHOJI KOZUKABIDEKI MATSUNAGA
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1991 Volume 7 Issue Supple Pages 1247-1248

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Abstract

The determination of trace metals has been carried out by inductively coupled plasma mass spectrometry. A tantalum sample was dissolved and the influence of the matrix was rejected by anion exchange. Detection limits were 0.006-0.02 wt.ppm. This method is being used for the analysis of tantalum oxide films.

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