Analytical Sciences
Online ISSN : 1348-2246
Print ISSN : 0910-6340
ISSN-L : 0910-6340
ANALYSIS OF ZIRCONIUM NITRIDE FILM BY INDUCTIVELY COUPLED PLASMA EMISSION SPECTROMETRY
RYOICHI TSUKAHARAYOSHIHIRO HIROTAYOSHIKANE KUBOTAGORO ICHIKAWA
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1991 Volume 7 Issue Supple Pages 1251-1254

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Abstract

After digestion of zirconium nitride film in hydrofluoric acid without loss of nitrogen, zirconium and nitrogen were determined by inductively coupled plasma-atomic emission spectrometry with internal standardization and titration method using an autotitrator respectively. The molar ratio of zirconium to nitrogen was 1:0.99 and the RSD for 4 samples was 0.49%.

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