MATERIALS CHARACTERIZATION WITH 3-DIMENSIONAL ION MICROSCOPY/MICROPROBE ANALYSIS

Abstract

An automated camera based detection system and image analysis system is described for secondary ion microscopy/ion microprobe analysis with the CAMECA ims 4f instrument. Procedures for high dynamic range image acquisition and display in the ion microscope operation mode rely on a single microchannel plate, a high sensitivity camera and a KONTRON IBAS image processor system. In the ion microprobe mode modifications are made to the primary deflection electronics of the SIMS instrument.