Analytical Sciences
Online ISSN : 1348-2246
Print ISSN : 0910-6340
ISSN-L : 0910-6340
Determination of Impurities in Single-Crystal Silicon Carbide by Inductively Coupled Plasma Mass Spectrometry
Shoji KOZUKAMasaru HAYASHIHideki MATSUNAGA
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1993 Volume 9 Issue 5 Pages 735-736

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