Bulletin of the Chemical Society of Japan
Online ISSN : 1348-0634
Print ISSN : 0009-2673
ISSN-L : 0009-2673
 
Development of UV-Curable Resins Suitable for Reverse-Tone Lithography for Au Metamaterials Using a Print-and-Imprint Method
Takuya UeharaShinya SatoShunya ItoHaruna YanoTakahiro NakamuraMasaru Nakagawa
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2018 Volume 91 Issue 2 Pages 178-186

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Abstract

We developed a UV-curable resin (NL-SU1) suitable for screen printing with laser-drilled polyimide masks and reverse-tone nanoimprint lithography. The viscosity of the UV-curable resin composed of two bisphenol A-based monomers was adjusted to 11.0 Pa·s for the screen printing process. It was determined by photo-differential scanning calorimetry that photoinitiator Irgacure 369 was suitable for high methacrylate consumption in UV curing. The UV-curable resin after curing could be used as a top-coated resist layer on another imprinted resist layer because of its sufficient contrast in oxygen reactive ion etching and argon ion milling. We demonstrated a method for reverse-tone lithography in a print–and-imprint method to fabricate 20-nm-thick and 50-nm-linewide Au split-ring resonator arrays.

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© 2018 The Chemical Society of Japan
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