Coincidence Measurement Study of Secondary-Ion Emission from Solid Surfaces Excited with Multi-Charge Ions(Current Topics)

Abstract

When a multi-charge ion approaches some solid surfaces, electron transfer from the surface to the ion causes secondary-ion emission. This is called potential sputtering. However, the details of the atomic processes have not been clarified. A coincidence measurement between reflected and secondary ions was conducted to study the atomic processes. The relationship between desorption-induced by electronic transitions (DIET) and the following ion scattering process was clarified. The results provided new information about potential sputtering.