Butsuri
Online ISSN : 2423-8872
Print ISSN : 0029-0181
ISSN-L : 0029-0181
Development of Radiation Imaging Sensor with SOI Technology
Yasuo AraiToshinobu MiyoshiRyo IchimiyaYoshiyuki Onuki
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JOURNALS OPEN ACCESS

2010 Volume 65 Issue 9 Pages 691-698

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Abstract

There are large demands for high-resolution, high-speed, and high-sensitivity radiation imaging sensor in many fields. To fulfill these demands, it is indispensable to combine the sensor and the readout electronics in a chip, but this was difficult to achieve in existing technologies. However this long time dream of developing monolithic radiation detector become possible by using Silicon-On-Insulator technology. We describe the status of SOI imaging sensor development and remaining issues.

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© 2010 The Physical Society of Japan
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