2010 Volume 65 Issue 9 Pages 691-698
There are large demands for high-resolution, high-speed, and high-sensitivity radiation imaging sensor in many fields. To fulfill these demands, it is indispensable to combine the sensor and the readout electronics in a chip, but this was difficult to achieve in existing technologies. However this long time dream of developing monolithic radiation detector become possible by using Silicon-On-Insulator technology. We describe the status of SOI imaging sensor development and remaining issues.