2014 Volume 69 Issue 12 Pages 876-880
Spectral deconvolution, in which a multimodal spectrum is decomposed into a sum of unimodal peak function such as Gaussian or Lorentzian function, is widely used for spectroanalysis such as X-ray photoelectron spectroscopy. For the spectral deconvolution, it is very important to determine the number of peaks for fitting from the observed data only. In this article, we introduce the Bayesian approach to the spectral deconvolution.