Chemistry Letters
Online ISSN : 1348-0715
Print ISSN : 0366-7022
ISSN-L : 0366-7022
A Negative-Working Alkaline Developable Photoresist Based on Calix[4]resorcinarene, a Cross-linker, and a Photoacid Generator
Tomonari NakayamaKohji HagaOsamu HabaMitsuru Ueda
Author information
JOURNALS RESTRICTED ACCESS

1997 Volume 26 Issue 3 Pages 265-266

Details
Abstract

A negative working photoresist based on calix[4]resorcinarene, 4,4′-methylenebis[2,6-bis(hydroxymethyl)phenol] (MBHP) as a cross-linker, and a photoacid generator, diphenyliodonium 9,10-dimethoxyanthracene-2-sulfonate (DIAS), has been developed. A clear negative pattern was obtained when it was exposed to 365 nm UV light and postbaked at 130 °C, followed by developing with a 0.5% aqueous tetramethylammonium hydroxide solution at room temperature.

Information related to the author

This article cannot obtain the latest cited-by information.

© 1997 The Chemical Society of Japan
Previous article Next article
feedback
Top