Chemistry Letters
Online ISSN : 1348-0715
Print ISSN : 0366-7022
ISSN-L : 0366-7022
Letter
Patterned Metal Deposition on Si Based on Self-Assembly and Inkjet Printing
Jin-Yi WangSheng-Juan HuoWen-Bin CaiQun-Jie Xu
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2006 Volume 35 Issue 6 Pages 582-583

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Abstract

A novel maskless and wet process for patterned metallization on a Si wafer was proposed, which incorporates an initial self-assembly of aminosilane as the organic glue layer followed by patterned inkjet printing of Au colloids or Pd(II) species as the catalyst template and finalized by selective chemical plating to form desired patterns of metals.

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© 2006 The Chemical Society of Japan
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