Chemistry Letters
Online ISSN : 1348-0715
Print ISSN : 0366-7022
ISSN-L : 0366-7022
Letter
Fabrication of Gold Split-ring Resonator Arrays by Surface-assisted Ultraviolet Nanoimprint Lithography Using Hydroxy-terminated Alkanethiol Monolayers
Takuya UeharaTatsuya TomiokaShoichi KuboMorihisa HogaMasaru Nakagawa
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2013 Volume 42 Issue 12 Pages 1475-1477

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Abstract

Dewetting behaviors of sub-50-nm-thick ultraviolet-curable resin films comprising hydroxy-containing (meth)acrylate monomers on modified Au-plated substrates were investigated by fluorescence microscopy. Hydroxy-terminated alkanethiol-adsorbed monolayers on Au surfaces suppressed dewetting of the thin spin-coated films and allowed the fabrication of 50-nm-line-width Au split-ring resonator (SRR) arrays by ultraviolet nanoimprint lithography.

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© 2013 The Chemical Society of Japan
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