Chemistry Letters
Online ISSN : 1348-0715
Print ISSN : 0366-7022
ISSN-L : 0366-7022
Letter
Fabrication and Properties of Microcapacitors with a One-nanometer-thick Single Ti0.87O2 Nanosheet
Daisuke OgawaKosho AkatsukaTomoteru FukumuraMinoru OsadaTakayoshi SasakiTetsuya Hasegawa
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2014 Volume 43 Issue 3 Pages 307-309

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Abstract

The dielectric and insulating properties of a single Ti0.87O2 nanosheet were investigated by fabricating an Au/single Ti0.87O2 nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV cm−1.

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© 2014 The Chemical Society of Japan
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