Chemistry Letters
Online ISSN : 1348-0715
Print ISSN : 0366-7022
ISSN-L : 0366-7022
Fabrication of Au Split-Ring Resonator Arrays by Surface-Assisted Ultraviolet Nanoimprint Lithography using Hydroxyl-Terminus Alkanethiol Monolayers
Takuya UeharaTatsuya TomiokaShoichi KuboMorihisa HogaMasaru Nakagawa
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JOURNALS RESTRICTED ACCESS Advance online publication

Article ID: 130720

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Abstract

Dewetting behaviors of sub-50-nm-thick ultraviolet-curable resin films comprising hydroxyl-containing (meth)acrylate monomers on modified Au-plated substrates were investigated by fluorescence microscopy. Hydroxyl-terminus alkanethiol adsorbed monolayers on Au surfaces suppressed dewetting of the thin spincoated films and allowed the fabrication of 50-nm-linewidth Au split-ring resonator (SRR) arrays by ultraviolet nanoimprint lithography.

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© 2013 The Chemical Society of Japan
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