Chemistry Letters
Online ISSN : 1348-0715
Print ISSN : 0366-7022
ISSN-L : 0366-7022
Fabrication and Properties of Micro Capacitors with a One-Nanometer-Thick Single Ti0.87O2 Nanosheet
Daisuke OgawaKosho AkatsukaTomoteru FukumuraMinoru OsadaTakayoshi SasakiTetsuya Hasegawa
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JOURNALS RESTRICTED ACCESS Advance online publication

Article ID: 130925


The dielectric and insulating properties of a single Ti0.87O2 nanosheet were investigated by fabricating an Au / single Ti0.87O2 nanosheet / Au planar micro-capacitor structure. Capacitance and electric measurements of the nanosheet micro-capacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV/cm.

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