Flat Gyro-Sensor for Automotive Application

Abstract

A compact, angular-rate sensor module has been developed using a flatly supported, quartz sensing element of double T-shaped resonators. The sensing element has both drive and pickup resonators in the same plane of a Z-cut quartz wafer to detect angular-rate motion perpendicular to the plane. Because of good temoerature stability of the quartz, and symmetric structure of the double T-shaped resonators, the sensor module also can achieve small offset drift, high S/N (Signal to Noise ratio), and excellent immunity to vibration noise.