The 24th JIEP Annual Meeting
Session ID : 12A-09
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Host: Japan Institute of Electronics Packaging
The 24th JIEP Annual Meeting
Preparation of biomimetic silicon surfaces using self-organized porous polymer films as novel dry etching masks
Yuji Hirai, Hirotaka Nakamichi, Hiroshi Yabu, Yasutaka Matsuo, Kuniharu Ijiro, *Masatsugu Shimomura
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