e-Journal of Surface Science and Nanotechnology
Online ISSN : 1348-0391
ISSN-L : 1348-0391
Regular Papers
Potential of High-density Convergent Plasma Sputtering Device for Magnetic Film Deposition
Taisei MotomuraTatsuo Tabaru
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2019 Volume 17 Pages 27-31

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Abstract

A high-density convergent plasma sputtering device has been developed for magnetic film deposition. The external convergent magnetic field is produced by a solenoid coil and a permanent magnet positioned behind the ferromagnetic metal target. The ion density and the ion accelerating voltage are individually controlled since the ion production and sputtering areas are separated like an ion beam sputtering device. Iron (Fe) thin films are deposited on an unheated substrate using argon plasmas under the target to substrate distance of 54 mm. The films consist of the α-Fe phase with a body-centered cubic crystal structure. The deposition rate was about 25 nm min−1 at a sputtering gas pressure of 0.2 Pa.

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この記事はクリエイティブ・コモンズ [表示 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by/4.0/deed.ja
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