A New Metal-Ion Source with An Electron-Beam Evaporator for Surface Modification

Abstract

A metal-ion source equipped with an EB (Electron Beam) gun for the evaporation of solid materials was designed, and its prototype source was constructed. The prototype produced the source plasma successfully by PIG discharge with the metal vapors of titanium, zinc, and manganese without feeding any ignition gas. As a preliminary results, the extracted total currents composed of Ti⁺ , Zn⁺ and Mn⁺ ions were measured as unsaturated currents of about 50 , 115 and 155 μA·dc, respectively, at an extraction voltage of 6 kV. [DOI: 10.1380/ejssnt.2010.131]