抄録
This paper describes a method for automatic acquisition of a high-resolution transmission electron microscope (TEM) tilt series over the full angular range from −90° to +90° for TEM tomography. The goniometer controller of a conventional TEM was modified to allow external computer control over specimen position along the three translational and one rotational axis. The TEM parameters, stage motion, and image acquisition were synchronously controlled by home-coded software. The shift in the specimen position with each step of rotation was determined at low magnification by the cross-correlation function and then compensated by moving the stage. The image shift coil and objective lens were only used for fine-tuning. As a result, a tilt series over a full angular range was automatically collected at a magnification of around ×200k. The specimen position remained within less than around ±100 nm in the three directions during image collection. [DOI: 10.1380/ejssnt.2010.178]
