Nano Imprinting Lithography for Liquid Crystal Alignment Using a New Polyimide Imprinting Material

Abstract

A new hybrid type polyimide imprinting material which consists of polyester amic acid and epoxy resin is presented for a liquid crystal alignment with nano-imprinting lithography. A mold pattern is transferred clearly into the material under suitable pressure, temperature, and time conditions. This material shows excellent capability in liquid crystal alignment as well as nano-imprinting lithography. For comparison, polymethylmethacrylate was used as thermoplastic material for an LC alignment. Liquid crystal cells with this material show good electro-optic characteristics in liquid crystal devices unchangingly after thermal aging test due to its high thermal stability.