An Idea of Overcoming the Oxidation of Mn Metal in the Crucible during the Reactive Evaporation Process

Abstract

Manganese oxide films for lithium secondary batteries were prepared using a reactive evaporation method. One of the problems is that the manganese metal in the crucible (Mn evaporant) suffers oxidation from oxygen atmosphere. This deteriorates the Mn deposition rate with increasing the deposition run. The feasibility of overcoming the oxidation of Mn metal in the crucible was investigated in the present paper. A separator was introduced in the bottom of the Mn crucible. It can isolate Mn evaporant from incoming oxygen atoms. It was found that the oxidation of Mn evaporant could be inhibited up to the oxygen flow rate of 7 sccm. It can also improve the reproducibility of deposition process because of stabilizing the deposition rate.