Electrochemistry
Online ISSN : 2186-2451
Print ISSN : 1344-3542
ISSN-L : 1344-3542
Articles
High-quality Growth of TiO2 Thin Film from Its Precursor Solution by New Sol-gel Method
El-Maghraby MOHAMEDYuuko NAKAMURAYasuhiro FUJIIMichiyo KAMIYASeichi RENGAKUJI
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2004 Volume 72 Issue 6 Pages 455-457

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Abstract

TiO2 thin film, which has high photocatalytic property, was fabricated from its precursor solution by spin-coating method. The solution was prepared by the recently developed advanced sol-gel method. This liquid process is based on the hydrolysis and polymerization of Ti alkoxide in mixed solvent of butanol and toluene. The obtained solution was transparent without precipitate and stable, and thus the metal oxide precursor solution was prepared. TG-DTA analysis of the powder dried in vacuum and XRD patterns of the annealed films showed that the crystalline anatase phase appeared at 300°C. This temperature is lower than that obtained from the conventional sol-gel method. From AFM imaging, the surface of TiO2 thin film coated on quartz or glass substrates appeared flat. The photocatalytic activity of TiO2 thin film prepared by advanced sol-gel method was higher than that prepared by conventional sol-gel method.

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© 2004 The Electrochemical Society of Japan
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