IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
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Monolithic reconfigurable bandpass filter using single-pole double-throw RF MEMS switches
Jong-Man KimSanghyo LeeChang-Wook BaekYoungwoo KwonYong-Kweon Kim
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2008 Volume 5 Issue 13 Pages 483-489

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Abstract

This paper demonstrates a micromachined two-state switchable bandpass filter operating at 2.4 and 5.2GHz. The proposed filter is monolithically composed of two single-crystal silicon (SCS) single-pole double-throw (SPDT) RF MEMS switches and two kinds of two-pole LC-resonators, and it is fabricated by a robust silicon on glass (SiOG) process that combines various micromachining technologies. The insertion losses for each output port of the fabricated SPDT switch was less than 0.15dB up to 5GHz. The input to output isolations were higher than 31dB for each port. The measured center frequencies of the fabricated reconfigurable filter were 2.9 and 5.4GHz, and the measured passband losses were 2.43 and 5.51dB in the low and high frequency bands, respectively.

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© 2008 by The Institute of Electronics, Information and Communication Engineers
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