Sen'i Gakkaishi
Online ISSN : 1884-2259
Print ISSN : 0037-9875
Development of Filters for Gas and Chemicals in Semiconductor Processing
MIKIO TAKAHASHI, AKIHTSA INOUE
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JOURNALS FREE ACCESS

Volume 42 (1986) Issue 10 Pages P407-P412

DOI https://doi.org/10.2115/fiber.42.10_P407
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Sen-iso Kogyo

THE JOURNAL OF THE SOCIETY OF TEXTILE INDUSTRY< JAPAN (Sen-I Kogyo Gakukwaishi)

Sen-ito Kogyo

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Journal of Fiber Science and Technology

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