PLASMA-INDUCED POLYMERIZED NAPHTHALENE FILM AND ITS APPLICATION FOR TRANSMISSION ELECTRON MICROSCOPIC STUDY

Akira Tanaka; Masa-aki Kakimoto; Koji Hirano; Hiroyuki Fukuda; Toshinari Araki; Tadashi Mochida; Sei-ichi Yokoi; Keiji Iriyama

doi:10.2115/fiber.48.8_396

Akira Tanaka, Masa-aki Kakimoto, Koji Hirano, Hiroyuki Fukuda, Toshinari Araki, Tadashi Mochida, Sei-ichi Yokoi, Keiji Iriyama

著者情報

ジャーナルフリー

1992 年 48 巻 8 号 p. 396-398

DOI https://doi.org/10.2115/fiber.48.8_396

詳細

抄録

A plasma-induced polymerized naphthalene (PPN) film for the use of a replica method coupled with transmission electron microscopy (TEM) was studied in order to visualize the surface microstructures of various organic and inoraganic materials such as trenched silicon wafers and Langmuir-Blodgett (LB) films. As a result, we found that each PPN film examined had its smooth surface on the electron microscopic scale. We were able to visualize the surface microstructures of various materials.

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