水素ガスセンサ

抄録

In order to detect hydrogen of gas concentration covering from 0.1 ppm to 100 vol%, the following three different types of hydrogen gas sensors are available: a hydrogen selective hot wire type semiconductor sensor (CH-H), a catalytic combustion type sensor (CS) and a gas thermal conduction type sensor (CT). CH-H can selectively detect hydrogen in the region from 0. 1 ppm to 1 vol%. CS is available for the detection of hydrogen from 0.1 to 4 vol% (the lower explosion limit of hydrogen) and has a rather poor selectivity to hydrogen. The above two sensors are applicable to hydrogen leak detection. CT is available for the detection of hydrogen from 1 to 100 vol% and is especially suitable for the control of hydrogen gas concentration in vol% order.