Monodispersed VO2-SiO2 nanohybrid particles were obtained by reducing V2O5-SiO2 nanohybrid particles. V2O5-SiO2 nanohybrid particles were prepared by coating a nanolayer of V2O5 onto monodispersed SiO2 particles from modified vanadium alkoxide and monodispersed SiO2 particles mixture sol, followed by the annealing at 350℃ for 2 h in air. As a result, monodispersed SiO2 particles were effectively coated by using acetic acid anhydride as a chelating reagent, and VO2-SiO2 monodispersed nanohybrid particles were successfully prepared by annealing the V2O5-SiO2 nanohybrid particles up to 500℃ for 2h in H2/Ar atmosphere. EPMA analysis also exhibited the uniform vanadium distribution on the monodispersed SiO2 particles, showing the homogeneous coating of VO2 nanolayer onto the monodispersed SiO2 particles.