Error Compensation of a Position Measurement System with Moving Landmarks for a Microrobot

Abstract

Error in a position measurement system for a microrobot is described. The system consists of position sensitive detectors and moving landmarks, which are lasers on linear stages. The system requires the accurate positioning of the linear stages. The position measurement accuracy is investigated by changing the angle formed by the linear stages. In our experimental conditions, the maximum measurement error is about 0.2 mm, which is reduced to 5 μm by using the least square method.