2012 年 132 巻 3 号 p. 344-349
A battery-less wireless sensor node using a vibration-driven MEMS electret energy harvester has been prototyped. With hybrid high-aspect ratio parylene springs and high-performance electret material based on perfluoro polymer CYTOP, more than 3μW output power can be obtained in a broad range vibration frequency of 26-40 Hz at 1.4 G. By integrating the energy harvester with a power management circuit, low-power-consumption CPU, and RF IC, intermittent wireless transmission with an interval of 80.6 s has been realized.
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