Talbot効果による傾斜角度格子投影手法とリニアファイバアレイを用いた位相シフトによる3次元計測

抄録

3D shape measurement systems that use contactless methods are required for quality inspection of metal molds and electronic parts in industrial fields. A fringe projection method with phase-shifting method offers the advantages of high precision and high speed. Recently, since the size of electronic parts has become smaller, the pitch of a grating pattern projected onto a specimen should also become smaller. In this paper, a small pitch fringe projection method using Talbot effect with an SLD (Super luminescent diode) and a method to incline the appearing area of the fringe pattern are proposed. A linear fiber array with four cores is prototyped. A phase-shifting method using the linear fiber array is also proposed. The effectiveness is confirmed with the experimental results of shape measurement using a 3D shape measurement setup built with proposed method.