2020 Volume 140 Issue 11 Pages 1220-1229
This paper describes optimization of a proposed high reliability and wide SOA 100 V N-LDMOS transistor for automotive applications. The drift region of the device is enclosed with two P-type buried layers, dual RESURF structure, and the field plate forming a two-step structure is grounded. The drift region and the field plate were optimized to obtain high hot carrier endurance, high suppression of drain current expansion CE, high breakdown voltage BVDS, and low specific on-resistance RON,SP taking mass production into account. Within the mass production tolerance, the electric field near the gate-side drift region edge of the proposed device is about 70% of that of a conventional device under a high hot carrier generation condition, the drain voltage causing CE of the proposed device is about 20 V higher than that of the conventional device under a high CE generation condition, and the BVDS - RON,SP characteristic of the proposed device is at a state-of-the-art level: BVDS = 131 V and RON,SP = 150 mΩmm2 at the worst case. Furthermore, due to slight changing the tolerance range, high ESD endurance of the proposed device could be obtained at the expense of RON,SP and suppression of CE a little bit.
The transactions of the Institute of Electrical Engineers of Japan.C
The Journal of the Institute of Electrical Engineers of Japan