冗長駆動アクティブ除振台に対するアクティブ故障診断設計

抄録

Depending on the load requirement, active vibration isolation table may equip with redundant actuators. For such the table, it may be difficult to isolate the faulty actuator due to the redundancy. This paper presents a design of active fault diagnosis for the redundant driven active vibration isolation tables. The simulation results show the effectiveness of the proposed active fault diagnosis system by comparing to the conventional passive fault diagnosis method.